Gerold W. Neudeck and Robert F. Pierret, Editors. Volume V. Introduction to Microelectronic. Fabrication. Second Edition. Richard C. Jaeger. Auburn University. ation – Free ebook download as PDF File .pdf) or A good book for Introduction to Microfabrication followed by Auburn University. . Manufacturing and Process Control – G. May, C. Spanos (Wiley, ) WW. Gerold W. Neudeck and Robert F. Pierret, Editors Volume V Introduction to Microelectronic Fabrication Second Edition Richard C. Jaeger Auburn University.
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Introduction to Microelectronic Fabrication : Volume 5 of Modular Series on Solid State Devices
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Focuses mainly on the basic processes used in fabrication, including lithography, oxidation, diffusion, ion implementation, and thin film deposition. Junction Formation and Characterization.
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Optical and Electron Microscopy. Selective Oxidation and Shallow Trench Formation. John Peterson is currently reading it Jan 07, Aditya Nahar marked it as to-read Aug 23, Lisa Terry is currently reading it Mar 04, Alex rated it really liked it May 18, Channeling, Lattice Damage, and Annealing.
Introduction to Microelectronic Fabrication: Volume 5 of Modular Series on Solid State Devices
This introductory book assumes minimal knowledge of the existence of integrated circuits and of the terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors. This work assumes a minimal knowledge of integrated circuits and of terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors.
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